High-Purity Semiconductor Chemical Containers & Canisters
Safe, Flexible & Ultra-Clean Solutions for Critical Materials Handling
Metriflow Solutions UHP canisters are designed for the safe storage, transfer, and delivery of high-purity chemicals—including metal-organic precursors, inorganic precursors, dopants, and specialty materials—our systems ensure contamination-free performance in demanding process environments.
Fully customizable in terms of capacity, port configuration, and certification requirements, each system is engineered to meet stringent UHP and safety standards, with leak-tight sealing and cleanroom-compatible construction.
Key Features
- 316L Stainless Steel
- Helium leak detection rate: ≤ 1.0 × 10⁻¹⁰ mbar·L/s (He)
- Electropolished: Ra≤0.25um (10µin)
- Excellent tightness
- Available in a wide range of capacities with customizable configurations to meet specific requirements
- Certificates : UN, ASME U/UM Certified
Liquid Precursor Canisters (Bubbler,Bypass)
Solid Precursor Canisters
- Designed for delivery of liquid precursors, these canisters are available in volumes from 1 L to 10 L (customizable), with chemical purity from 5N to 9N. Constructed with corrosion-resistant construction and UHP-compatible internal surfaces, they are suitable for chemicals like TEOS, HCDS, and Ti, Zr, Hf-based chemicals etc.
- Designed for the storage and delivery of solid precursors, these canisters are available in volumes from 1 L to 10 L (customizable), supporting materials such as AlCl₃, HfCl₄, and ZrCl₄ with purity levels from 5N to 8N. Engineered with corrosion-resistant construction and UHP-compatible internal surfaces, they support stable vapor delivery, and contamination-free performance in demanding semiconductor processes.
Bulk Chemical Storage & Supply Systems
Sampling & Transfer Cylinders
- Designed for high-capacity storage and delivery of high-purity chemicals, these systems offer volumes from 500 L to 26,000 L (customizable), with chemical purity from 5N to 9N. Featuring corrosion-resistant construction and leak-tight sealing, they ensure safe, stable, and contamination-free performance. Suitable for chemicals like MTS, TCS, TMA, TiCl₄, etc.
- Compact UHP sampling and transfer cylinders (25–200 mL) designed for high-purity liquid and solid chemicals (5N–9N), ensuring safe, contamination-free sampling and reliable material transfer. Built with corrosion-resistant materials and leak-tight sealing, they are ideal for laboratory analysis, process monitoring, and semiconductor applications.
Negative Pressure Gas Cylinders
- High-pressure and specialty gas cylinders designed for semiconductor gases such as WF₆, BCl₃, and ClF₃. Suitable for toxic and corrosive gases.
Applications
Semiconductor Manufacturing (ALD, CVD, MOCVD)
LED & Compound Semiconductor (GaN / SiC)
Photovoltaic (Solar Cell Manufacturing)
Flat Panel Display (FPD)
Electronic Chemicals Production & Packaging
pecialty Gas & Hazardous Chemical Handling
Research & Pilot Scale (R&D / Lab Applications)
Gas Delivery Systems & Integration