Liquid Delivery System for Safe & Continuous Semiconductor Process Liquids Delivery
MFX Liquid Delivery System
The MFX Liquid Delivery System is an ultra-high purity liquid delivery system designed for precise metering and stable delivery of process liquids in high-purity environments. The system integrates high-accuracy mass flow controllers with ultra-clean fluid pathways to ensure reliable flow regulation and minimal contamination.
Control Features
Process Panel
- Automation & Controls: PLC with 7–10" HMI supporting Startup, Purge, and Canister-Change routines, with alarms, interlocks, and data logging.
- Safety Architecture: Integrated gas detection, leak detection, E-stop, life-safety relay override, fire sensor interface (ROR/UV-IR), and configurable explosion-protection options.
- Purge & Vent Management: Dedicated purge panel, maintenance vent, and process exhaust tie-in for safe operation.
- Explosion-Protected Option: Positive-pressure cabinet with controlled purge (3–5 m³/h) for hazardous environments.
- Bubbler-Ready Interface: Clean interfaces compatible with ASM/LPE and similar Epi-Reactors (≤5 bara inlet typical).
- Modular & Scalable Platform: Canister sizes from 20–50 L starting capacity up to 200 L systems for expanded production demand.
- Field-Proven Enhancements: Degas module before bubbler, heated lines, and automated purge routines for process reliability.
- UHP Process Piping: 316L EP tubing with orbital welding and VCR fittings; heated lines available as required.
- UHP Valves: Panel-mounted pneumatic diaphragm on/off valves (PLC controlled) for high-purity applications.
- Precision Instrumentation: High-accuracy pressure transducers for stable and repeatable process control.
- Cleanroom Assembly: Class 100 cleanroom assembly and testing to ensure ultra-high purity standards.
- Safety & Compliance: SEMI S2, IECEx compliant and suitable for Class I, Division 2 hazardous locations.Documentation available for third-party certification.
Technical Specifications
Power
120/220 V, 50 Hz, approx. 2 kW (final per configuration)
Cabinet Footprint
Approx. 2500 (W) × 900 (D) × 2200 (H) mm
Process Purity
Example: Argon 5N; particles ≥0.15 μm < 0.1 / L
Canister & Handling
316L stainless steel canister station with integrated electronic scale;
compatible with 20–200 L containers.
Configurations
Standard: Standard 1-container (suitable for container sizes up to 50 L).
Advanced: Dual canister auto-crossover(up to 200 L main container + 50 L back up), degas module, enhanced safety interlocks.
Advanced: Dual canister auto-crossover(up to 200 L main container + 50 L back up), degas module, enhanced safety interlocks.
Delivery Methods
Option A – Gear Pump/Bellows Valve + MFM: Closed-loop precision
control for maximum stability and repeatability.
Option B – Push-Gas (Ar): Compact configuration; optional degas module to mitigate dissolved gas ingress.
Option B – Push-Gas (Ar): Compact configuration; optional degas module to mitigate dissolved gas ingress.
Vaporization
Optional heated vaporization tank when tool-side vaporization is not available;
omitted for direct liquid-to-bubbler delivery.
Pressure / Flow
Configurable to match tool specification; typical bubbler inlet ≤ 5 bar.
Supports precise MFM closed-loop feedback control.
System Signals
System OK, Request Chem, Purge, safety interlocks; optional bubbler
level-sensor handshake for automated flow logic.
Carrier Gas Control
Typically tool-controlled; optional LDS-side carrier gas regulation available
upon request.
Control & Data
PLC + HMI control with data export capability, recipe limits, user-level access
management, and event logging.
Applications
Chemical precursor Epitaxy (ASM/LPE) CVD/ALD precursors (TCS, TEOS,
TMA, etc.) University cleanrooms & research fabs Pilot manufacturing lines