Gas Cabinet for Safe & Continuous Semiconductor Gas Delivery
MFS Gas Cabinet
The MFS Gas Cabinet is designed for safe, stable, and uninterrupted delivery of high-purity gases in semiconductor and advanced manufacturing environments.
It integrates automatic cylinder switchover, multi-level safety protection, precision pressure regulation, and purge systems to ensure reliable operation while protecting personnel, equipment, and the environment.
Compatible with a wide range of gases including SiH₄, PH₃, B₂H₆, H₂, HBr, Cl₂, and more.
Designed in accordance with SEMI S2 safety standards.
Product Features
Standard Configurations
- Control System: PLC-based control system with HMI interface for intuitive operation.
- Continuous & Uninterrupted Supply: Automatic dual-cylinder switchover ensures seamless gas delivery for critical processes.
- Precision Pressure & Flow Control:Dual-stage regulation combined with stable flow control ensures repeatable and accurate process conditions.
- Integrated Gas Purification & Purge System:Fully automated purge sequences with high-purity nitrogen and vacuum evacuation to eliminate contamination.
- Advanced Safety Architecture:Multi-layer safety design protecting personnel,equipment,and environment.
- Safety Monitoring: Integrated safety monitoring system for continuous operational protection.
- Emergency System: Built-in emergency safety system for rapid response to fault conditions.
- Modular & Scalable Platform: Flexible configuration supporting various gas types, cylinder sizes, and future expansion.
- Control System:PLC-based control system with HMI interface.
- Enclosure:fully enclosed or semi-open cabinet.
- UHP-Compatible Design:Dual-stage pressure regulators.
EP 316L stainless steel and class 100/class 10 clean room assembly.
UHP orbitally welded. - Safety:Gas detection & monitoring sensors,Flame detection & high-temperature monitoring.
Automatic emergency shut-off system (EFS / fail-safe design). - Compliance: SEMI S2, IECEx compliant and suitable for Class I, Division 2 hazardous locations.Documentation available for third-party certification.
Technical Specifications
Applicable Gases
SiH₄, PH₃, B₂H₆, H₂, HBr, Cl₂, and other flammable, explosive, toxic, corrosive, or high-purity process gases
Control System
PLC + HMI
Enclosure & Ventilation:
Available in both fully enclosed and semi-open cabinet configurations, with integrated exhaust ventilation options.
Configurations
Standard: Single-cylinder.
Advanced: Dual-cylinder(one duty, one standby) with automatic switchover.
Advanced: Dual-cylinder(one duty, one standby) with automatic switchover.
Assembly & Tested
CLASS 100 / CLASS 10 cleanroom
Safety
Gas detection sensor, smoke sensor, high-temperature sensor, flame detector, EFS emergency shut-off
System Signals
System OK, Request Chem, Purge, safety interlocks;.
leak tested
Helium leak tested to 1.0 x 10-9 atm*cc/s.
Control & Data
PLC + HMI control with data export capability, recipe limits, user-level access
management, and event logging.
Compliance
Designed to support IECEx assemblies and SEMI S2 practices. Documentation
available for third-party certification.
Power
120/220 V, 50 Hz, approx. 2 kW (final per configuration)
Applications
Semiconductor manufacturing (etching, deposition, ion implantation)
Hazardous gas delivery for process tools
oxic gas handling systems (e.g., PH₃, B₂H₆)
Flammable gas supply (e.g., H₂, SiH₄)
Corrosive gas distribution (e.g., HCl, Cl₂, HBr)
High-purity gas supply systems
Continuous gas supply with automatic switchover
Gas source isolation and safety control
Tool-side gas delivery
Cleanroom gas distribution infrastructure